“…2. 6 Although we did not make any detailed analysis, another reduction of pumping speed at the high-pressure side may be attributed to another conductance effect at the gas exhaust port and also to a slowing down in rotation speed of the pump due to heavy gas load. In Fig.…”
“…2. 6 Although we did not make any detailed analysis, another reduction of pumping speed at the high-pressure side may be attributed to another conductance effect at the gas exhaust port and also to a slowing down in rotation speed of the pump due to heavy gas load. In Fig.…”
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