1999
DOI: 10.3131/jvsj.42.663
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A Conductance Effect on the Pumping Speed Characteristics of Screw Vacuum Pump.

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“…2. 6 Although we did not make any detailed analysis, another reduction of pumping speed at the high-pressure side may be attributed to another conductance effect at the gas exhaust port and also to a slowing down in rotation speed of the pump due to heavy gas load. In Fig.…”
Section: Performancementioning
confidence: 94%
“…2. 6 Although we did not make any detailed analysis, another reduction of pumping speed at the high-pressure side may be attributed to another conductance effect at the gas exhaust port and also to a slowing down in rotation speed of the pump due to heavy gas load. In Fig.…”
Section: Performancementioning
confidence: 94%