A Depolarization Criterion in Mueller Matrices

Gil, José J.; Bernabéu, Eusebio

doi:10.1080/713821732

Cited by 168 publications

(96 citation statements)

References 6 publications

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“…The value for D ranges from 0 (nondepolarizing) to 1 (perfectly depolarizing). 11,12 Calculation of the anisotropy coefficients (α, β, and γ) from experimental MMSE data free of depolarization is very simple and straightforward. 13 Nondepolarizing MMSE data are retrieved using known mathematical decomposition techniques.…”

Section: Design Of Experimentsmentioning

confidence: 99%

Metrology for block copolymer directed self-assembly structures using Mueller matrix-based scatterometry

Dixit

Kamineni

Farrell

et al. 2015

J. Micro/Nanolith. MEMS MOEMS

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Abstract. Patterning based on directed self-assembly (DSA) of block copolymer (BCP) has been demonstrated to be a cost-effective manufacturing technique for advanced sub-20-nm structures. This paper describes the application of Mueller matrix spectroscopic ellipsometry (MMSE) based scatterometry to optically characterize polystyrene-b-polymethylmethacrylate patterns and Si fins fabricated with DSA. A regression-based (inverseproblem) approach is used to calculate the line-width, line-shape, sidewall-angle, and thickness of the DSA structures. In addition, anisotropy and depolarization calculations are used to determine the sensitivity of MMSE to DSA pattern defectivity. As pattern order decreases, the mean squared error value increases, depolarization value increases, and anisotropy value decreases. These specific trends are used in the current work as a method to judge the degree of alignment of the DSA patterns across the wafer. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Section: Design Of Experimentsmentioning

confidence: 99%

Metrology for block copolymer directed self-assembly structures using Mueller matrix-based scatterometry

Dixit

Kamineni

Farrell

et al. 2015

J. Micro/Nanolith. MEMS MOEMS

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“…Equation (25) shows that the Mueller matrix is associated with incident wavelength, spot size, coherence length, and propagation height. Thus, the depolarized state varies with incident-polarized states.…”

Section: Polarized Light Intensity In the Major Axis Directionmentioning

confidence: 99%

“…[24] using an optical path of 4.5 km. Gil and Bernabeu [25,26] introduced the depolarization index (DI), which features a well-defined and useful geometric meaning in the configuration space of the Mueller matrix. Two single-number metrics for the depolarization of samples were differentiated by Chipman [27].…”

Section: Introductionmentioning

confidence: 99%

Polarization Characteristics of a Partially Coherent Gaussian Schell-Model Beam in Slant Atmospheric Turbulence

Li¹,

Wu²,

Wang³

2011

PIER

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Abstract-On the basis of the extended Huygens-Fresnel principle, the cross-spectral density matrix (CSDM) of partially coherent Gaussian Schell-model (GSM) beams in the slant atmospheric turbulence is derived. Given that the light emitted from a transmitter is elliptically polarized light, the degree of polarization (DoP) of the partially coherent GSM beams is represented by Stokes parameters expressed by the elements of the CSDM. The expressions of the orientation angle, polarized light intensity in the major axis are derived and the numerical results are presented. Depolarization theory is studied using a Mueller matrix and the depolarization index (DI) is obtained to describe the depolarized state of the partially coherent GSM beams propagating in the slant atmospheric turbulence. Results show that the DOP and DI of the beam tend to their initial value in the long-range propagation.

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“…9). This depolarization index [13] graph is directly calculated from the measured Mueller Matrix. This does not occur at the center of the fiber, where the rate of change in the thickness is small and the spatial resolution of the instrument is sufficient.…”

Section: Application To Textile Fibersmentioning

confidence: 99%

Conversion of a polarization microscope into a Mueller matrix microscope. Application to the measurement of textile fibers

Kuntman¹,

Arteaga²,

Roca³

et al. 2015

Opt. Pura Apl.

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Conversión de un microscopio de polarización en un microscopio de matriz de Mueller. Aplicación a la medida de fibras textiles. ABSTRACT:This work reports the conversion of a commercial polarization microscope (Zeiss Jenaval) into an automatized Mueller matrix microscope. A Mueller matrix measurement provides the value of all the optical properties of a specimen (linear dichroism, linear birefringence, circular dichroism etc.) at a specific wavelength. In contrast to traditional polarization microscopes, which use white light and crossed polarizers to generate colored interference patterns that are analyzed by the microscope user and give only semi-quantitative results, here we demonstrate that it is possible to convert a polarization microscope into a Mueller microscope by only adding two motorized rotating compensators into the optical path without altering the optics or other opto-mechanical elements of the microscope. To our knowledge this is the most compact, fast and handy Mueller microscope ever developed. The performance of this new Mueller matrix microscope is illustrated with some birefringence measurements on textile fibers.Key words: microscopy, polarimetry, Mueller matrix, birefringence. RESUMEN:Este trabajo describe la conversión de un microscopio de polarización comercial (Zeiss Jenaval) en un microscopio de matriz de Mueller automatizado. Una medida de la matriz de Mueller proporciona todas las propiedades ópticas de una muestra (dicroísmo lineal, birrefringencia lineal, dicroísmo circular, etc) para una longitud de onda dada. Los microscopios de polarización tradicionales usan luz blanca y polarizadores cruzados para generar un patrón de colores interferencia que debe ser interpretado por el usuario del microscopio y proporciona resultados sólo semi-cuantitativos. En este trabajo demostramos que añadiendo dos compensadores rotatorios actuados por sendos motores es posible convertir un microscopio de polarización en un microscopio de matriz de Mueller sin alterar la óptica u otros elementos opto-mecánicos del microscopio. Creemos que este es el microscopio de matriz de Mueller más compacto, rápido y práctico que se ha desarrollado. El funcionamiento de este microscopio se demuestra con algunas medidas de birrefringencia en fibras textiles.Palabras clave: microscopía, polarimetría, matriz de Mueller, birrefringencia.

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A Depolarization Criterion in Mueller Matrices

Cited by 168 publications

References 6 publications

Metrology for block copolymer directed self-assembly structures using Mueller matrix-based scatterometry

Metrology for block copolymer directed self-assembly structures using Mueller matrix-based scatterometry

Polarization Characteristics of a Partially Coherent Gaussian Schell-Model Beam in Slant Atmospheric Turbulence

Conversion of a polarization microscope into a Mueller matrix microscope. Application to the measurement of textile fibers

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