2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) 2022
DOI: 10.1109/spawda56268.2022.10045863
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A Design Approach for High-Q FBARs with Double Frames

Biao Zhang
1
,
Weipeng Xuan
2
,
Linhao Shi
3
et al.
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