Abstract:We simulated a pulsed direct current (DC) planar magnetron discharge using fluid model, solving for species continuity, momentum, and energy transfer equations, coupled with Poisson equation and Lorentz force for electromagnetism. Based on a validated DC magnetron model, an asymmetric bipolar potential waveform is applied at the cathode at 50–200 kHz frequency and 50–80% duty cycle. Our results show that pulsing leads to increased electron density and electron temperature, but decreased deposition rate over no… Show more
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