A Front-Side Released Single Crystalline Silicon Piezoresistive Microcantilever Sensor

Zhou, Yixin; Wang, Zheyao; Zhang, Qi; Ruan, Wenzhou; Liu, Litian

doi:10.1109/jsen.2008.2012197

Cited by 27 publications

(28 citation statements)

References 46 publications

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“…(iii) Generally, the influence of isolation and immobilization layers on the device performance is ignored by various researchers primarily to reduce the computational complexity. 15,24,42,43 In the present work, we have included these layers and have numerically analyzed their influence on the thermo-electro-mechanical response of the sensor. (iv) All the above mentioned analyses were carried out at fixed cantilever dimensions.…”

Section: B Simulation Methodologymentioning

confidence: 99%

In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

Mathew

Sankar

2017

AIP Advances

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Over the years, piezoresistive nano cantilever sensors have been extensively investigated for various biological sensing applications. Piezoresistive cantilever sensor is a composite structure with different materials constituting its various layers. Design and modeling of such sensors become challenging since their response is governed by the interplay between their geometrical and constituent material parameters. Even though, piezoresistive nano cantilever biosensors have several advantages, they suffer from a limitation in the form of self-heating induced inaccuracy which is seldom considered in design stages. Although, a few simplified mathematical models have been reported which incorporate the self-heating effect, several assumptions made in the modeling stages result in inaccuracy in predicting sensor terminal response. In this paper, we model and investigate the effect of self-heating on the thermo-electro-mechanical response of piezoresistive cantilever sensors as a function of the relative geometries of the piezoresistor and the cantilever platform. Finite element method (FEM) based numerical computations are used to model the target-receptor interactions induced surface stress response in steady state and maximize the electrical sensitivity to thermal sensitivity ratio of the sensor. Simulation results show that the conduction mode of heat transfer is the dominant heat transfer mechanism. Furthermore, the isolation and immobilization layers play a critical role in determining the thermal sensitivity of the sensor. It is found that the shorter and wider cantilever platforms are more suitable to reduce self-heating induced inaccuracies. In addition, results depict that the piezoresistor width plays a more dominant role in determining the thermal drift induced inaccuracies compared to the piezoresistor length. It is found that for surface stress sensors at large piezoresistor width, the electrical sensitivity to thermal sensitivity ratio improves.

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Section: B Simulation Methodologymentioning

confidence: 99%

In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

Mathew

Sankar

2017

AIP Advances

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“…According to (6), (11) and (12), (14) can be approximated as (15) In the paper, (6) and (15) are approximate formula, so there may be a deviation between the theoretical and experimental results, which affects the accuracy of sensors.…”

Section: Principle Of Operationmentioning

confidence: 99%

“…Cantilevers have used as high sensitivity sensors in a variety of applications in chemical and biological processes [6]. Cantilever-based magnetic sensors also receive attention for their small volume and high sensitivity [2], [3], [7].…”

Section: Introductionmentioning

confidence: 99%

“…Cantilever-based magnetic sensors also receive attention for their small volume and high sensitivity [2], [3], [7]. Problems arise owing to stress from the fabrication process -including deposition, annealing, and the use of sacrificial layers -which results in upwarping [3], [6] or fracture of beams [7], causing unstable performance of cantilever [6].…”

Section: Introductionmentioning

confidence: 99%

“…A cylindrical ferromagnet (FM) is glued to the center of the SD as the sensing medium. Compared to optical, capacitive, and piezoelectric integrated sensing techniques, the piezoresistive type is the most convenient because of its simple design, straightforward electronic signal processing, and ease of integration [6], [7].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Micromechanical Magnetic Sensor Based on Cylindrical Ferromagnets

Chen

Qing-fu

2011

IEEE Sensors J.

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In order to solve the problems of cantilever-based magnetic sensors and develop the simple and low-cost magnetic field sensors, novel sensors based on a cylindrical ferromagnet attached to a silicon diaphragm and piezoresistive membrane are proposed. The interaction between the magnetic field and the ferromagnet generates a deflection of the diaphragm, which changes the piezoresistance and unbalances a Wheatstone bridge. The sensitivity of the sensors is proportional to the permeability, supply voltage, and aspect ratio of the ferromagnet. These low-cost, low-power sensors are easily integrated with electronic circuits.

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Temperature drift-aware material selection of composite piezoresistive micro-cantilevers using Ashby’s methodology

Mathew

Sankar

2020

Microsyst Technol

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A Front-Side Released Single Crystalline Silicon Piezoresistive Microcantilever Sensor

Cited by 27 publications

References 46 publications

In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

Micromechanical Magnetic Sensor Based on Cylindrical Ferromagnets

Temperature drift-aware material selection of composite piezoresistive micro-cantilevers using Ashby’s methodology

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