A fundamental study on the mechanism of electrolytic in-process dressing (ELID) grinding

Lim, H. S.; Fathima, K.; Kumar, A. Senthil; Rahman, M.

doi:10.1016/s0890-6955(02)00023-8

Cited by 97 publications

(44 citation statements)

References 12 publications

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“…5 [10,13,14,18]. Before grinding, a pre-dressing process using the ELID method is required for the purpose of maintaining the protrusion of diamond grains on the wheel surface.…”

Section: Wheel Dressing Mechanism In Elid Grindingmentioning

confidence: 99%

ELID grinding of silicon wafers: A literature review

Liu

Pei

Fisher

2007

International Journal of Machine Tools and Manufacture

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Silicon wafers are the most widely used substrates for fabricating integrated circuits. There have been continuous demands for higher quality silicon wafers with lower prices, and it becomes more and more difficult to meet these demands using current manufacturing processes. In recent years, research has been done on electrolytic in-process dressing (ELID) grinding of silicon wafers to explore its potential to become a viable manufacturing process. This paper reviews the literature on ELID grinding, covering its set-ups, wheel dressing mechanism, and experimental results. It also discusses the technical barriers that have to be overcome before ELID grinding can be used in manufacturing.

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“…5 [10,13,14,18]. Before grinding, a pre-dressing process using the ELID method is required for the purpose of maintaining the protrusion of diamond grains on the wheel surface.…”

Section: Wheel Dressing Mechanism In Elid Grindingmentioning

confidence: 99%

ELID grinding of silicon wafers: A literature review

Liu

Pei

Fisher

2007

International Journal of Machine Tools and Manufacture

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“…Electrochemical machining is also used in the in-process machining of grinding wheels. Lim et al (2002a) studied the mechanisms of dressing and grinding operations. The retrofitted grinding machine they developed consisted of a metal-bonded grinding wheel and a dressing unit which utilises the effects of electrical discharge and electrochemical processes for the in-process dressing of the wheel (Fathima et al, 2007).…”

Section: Mechanical Machining and Ecmmentioning

confidence: 99%

A review of hybrid manufacturing processes – state of the art and future perspectives

Zhu

Dhokia

Nassehi

et al. 2013

International Journal of Computer Integrated Manufacturing

249

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Today, hybrid manufacturing technology has drawn significant interests from both academia and industry due to the capability to make products in a more efficient and productive way. Although there is no specific consensus on the definition of the term 'hybrid processes', researchers have explored a number of approaches to combine different manufacturing processes with the similar objectives of improving surface integrity, increasing material removal rate, reducing tool wear, reducing production time and extending application areas. Thus, hybrid processes open up new opportunities and applications for manufacturing various components which are not able to be produced economically by processes on their own. This review paper starts with the classification of current manufacturing processes based on processes being defined as additive, subtractive, transformative, joining and dividing. Definitions of hybrid processes from other researchers in the literature are then introduced. The major part of this paper reviews existing hybrid processes reported over the past two decades. Finally, this paper attempts to propose possible definitions of hybrid processes along with the authors' classification, followed by discussion of their developments, limitations and future research needs.

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“…Lim et al [6] proposed that demands for high quality surface finish, dimensional accuracy and form accuracy has required for optical surfaces and it is very difficult to achieve these using conventional grinding methods. ELID grinding is one new and efficient method that uses a metal-bonded diamond grinding wheel in order to achieve a mirror surface finish especially on hard and brittle materials and explained the fundamental mechanism of ELID grinding and so it has been studied here by conducting experiments to establish optimal grinding parameters to obtain better surface finish under various in process dressing conditions.…”

Section: Advances In Mechanical Engineeringmentioning

confidence: 99%

Multiobjective Optimization of ELID Grinding Process Using Grey Relational Analysis Coupled with Principal Component Analysis

Prabhu

Vinayagam

2014

Advances in Mechanical Engineering

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Carbon nanotube (CNT) mixed grinding wheel has been used in the electrolytic in-process dressing (ELID) grinding process to analyze the surface characteristics of AISI D2 Tool steel material. CNT grinding wheel is having an excellent thermal conductivity and good mechanical property which is used to improve the surface finish of the work piece. The multiobjective optimization of grey relational analysis coupled with principal component analysis has been used to optimize the process parameters of ELID grinding process. Based on the Taguchi design of experiments, an L9 orthogonal array table was chosen for the experiments. The confirmation experiment verifies the proposed that grey-based Taguchi method has the ability to find out the optimal process parameters with multiple quality characteristics of surface roughness and metal removal rate. Analysis of variance (ANOVA) has been used to verify and validate the model. Empirical model for the prediction of output parameters has been developed using regression analysis and the results were compared for with and without using CNT grinding wheel in ELID grinding process.

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A fundamental study on the mechanism of electrolytic in-process dressing (ELID) grinding

Cited by 97 publications

References 12 publications

ELID grinding of silicon wafers: A literature review

ELID grinding of silicon wafers: A literature review

A review of hybrid manufacturing processes – state of the art and future perspectives

Multiobjective Optimization of ELID Grinding Process Using Grey Relational Analysis Coupled with Principal Component Analysis

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