Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films
 2000
DOI: 10.1116/1.582298
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A gradational lead screw dry vacuum pump

Isao Akutsu1,
Takanori Matsuoka2,
M.M. Ozaki3
et al.

Abstract: Design and operation of scroll-type dry primary vacuum pumps

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