The low-pass filter (LPF) is a key component for high power RF generators generating 40.68 MHz sine wave, since the LPF should reject harmonic noises and handle high input power simultaneously. We propose a novel LPF, operating at 30 kW with good skirt performance. The proposed filter is a 7th order Butterworth type and consists of four capacitors and three inductors. The capacitors and inductors are implemented by copper plates, teflon insulators and copper plates with screws, respectively. The measured values of S 11 , S 21 and phase of the proposed LPF are À26.4 dB, À0.57 dB, and À163.5 degrees at 40.68 MHz, respectively. The S 21 values at 2nd (81.36 MHz) and 3rd (122.04 MHz) harmonics are À19.5 dB and À29.3 dB, respectively. The measured spectrum data on the surface of RF cable that is connected to the LPF output were À41.0 dBm at 40.68 MHz and À78.8 dBm at 81.36 MHz. The difference value of 37.8 dB is sufficient for harmonic suppression. In addition, arcing and thermal problems do not occur.