A high-precision eight-AFM probe rotary exchange module

Abstract

In this work, a high-precision atomic force microscope (AFM) probes rotary exchange module was developed. The module is capable of installing up to eight AFM probes simultaneously. It can achieve in situ rotary exchange of different AFM probes inside the AFM chamber with as high as 3 μrad rotation precision by program control. As a result, different measurements in the designated environments can be continuously conducted as required without introducing contaminants from outside. The reliability and function of the module were experimentally validated through surface topography scanning and wear tests. The module can serve as a useful tool for studying nanotribology.