A high-SPL piezoelectric MEMS loud speaker based on thin ceramic PZT

Wang, Haoran; Chen, Zhenfang; Xie, Huikai

doi:10.1016/j.sna.2020.112018

Cited by 47 publications

(28 citation statements)

References 19 publications

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“…When designing the fundamental resonant frequency, there are two considerations. On one hand, to achieve high SPL at low frequencies and thus improve the acoustic performance over a wide frequency range, the fundamental drum mode frequencies are typically designed at around 2 kHz to 3 kHz [ 16 , 34 , 35 ]. On the other hand, from the acoustic point of view, the drum mode vibration with the deformed emissive surface and higher harmonics stimulation due to nonlinearities will distort the acoustic wavefront, therefore causing sound distortions and deteriorating the sound quality [ 2 ].…”

Section: Theory and Modeling Of Mems Speakersmentioning

confidence: 99%

“…Huang et al studied the sound pressure response of miniaturized moving-coil loudspeakers using an equivalent circuit method (ECM), which can simulate the electrical, mechanical, and acoustical responses and optimize the device designs [ 44 ]. These methods are also called electro-mechano-acoustical modeling, or lumped element modeling (LEM), which can be applied to study the effects of different acoustic enclosures and model the performances of MEMS speakers based on different transduction mechanisms [ 16 , 45 ]. LEM is a simple and efficient tool for designing and analyzing multiphysics systems as well as for predicting their responses.…”

Section: Theory and Modeling Of Mems Speakersmentioning

confidence: 99%

“…The LEM has been widely applied to predict the dynamic responses of MEMS speakers, especially at low-frequency regions or in the neighborhood of the fundamental resonant frequency due to its simplicity [ 16 , 47 ]. However, the LEM is not sufficient to model higher order resonant modes and incapable to well predict the high frequency responses of MEMS speakers.…”

Section: Theory and Modeling Of Mems Speakersmentioning

confidence: 99%

“…Many researchers have developed MEMS speakers based on various transduction mechanisms and achieved promising results, including electrodynamic MEMS speakers [ 5 , 6 , 7 ], electrostatic MEMS speakers [ 8 , 9 ], piezoelectric MEMS speakers [ 10 , 11 , 12 ], and thermoacoustic MEMS speakers [ 13 , 14 ]. Various materials and fabrication approaches have also been explored for developing MEMS speakers [ 15 , 16 , 17 ]. The performances of MEMS speakers have been evaluated and compared with conventional speakers in terms of several key specifications, such as device footprint, output sound pressure level (SPL), power consumption, bandwidth, and total harmonic distortion (THD) [ 2 , 9 , 10 , 17 ].…”

Section: Introductionmentioning

confidence: 99%

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Review of Recent Development of MEMS Speakers

Wang

Zheng

et al. 2021

Micromachines

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Facilitated by microelectromechanical systems (MEMS) technology, MEMS speakers or microspeakers have been rapidly developed during the past decade to meet the requirements of the flourishing audio market. With advantages of a small footprint, low cost, and easy assembly, MEMS speakers are drawing extensive attention for potential applications in hearing instruments, portable electronics, and the Internet of Things (IoT). MEMS speakers based on different transduction mechanisms, including piezoelectric, electrodynamic, electrostatic, and thermoacoustic actuation, have been developed and significant progresses have been made in commercialization in the last few years. In this article, the principle and modeling of each MEMS speaker type is briefly introduced first. Then, the development of MEMS speakers is reviewed with key specifications of state-of-the-art MEMS speakers summarized. The advantages and challenges of all four types of MEMS speakers are compared and discussed. New approaches to improve sound pressure levels (SPLs) of MEMS speakers are also proposed. Finally, the remaining challenges and outlook of MEMS speakers are given.

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Section: Theory and Modeling Of Mems Speakersmentioning

confidence: 99%

Section: Theory and Modeling Of Mems Speakersmentioning

confidence: 99%

Section: Theory and Modeling Of Mems Speakersmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Review of Recent Development of MEMS Speakers

Wang

Zheng

et al. 2021

Micromachines

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“…The advantage of lead titanate PbTiO 3 (PT) and lead zirconate titanate PbZr 1−x Ti x O 3 (PZT) as Pb-based ferroelectric materials, has been well exhibited in infrared pyroelectric sensors, piezoelectric transducers, nonvolatile memories and so on [1][2][3][4]. Furthermore, some cations were also introduced to modify their properties and improve their applications [5][6][7][8][9][10][11][12][13][14][15].…”

Section: Introductionmentioning

confidence: 99%

Mn ions' site and valence in PbTiO3 based on the native vacancy defects

Xin¹,

Pang²,

Gao³

et al. 2021

Condens. Matter Phys.

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Mn ions' doping site and valence were studied in PbTiO3 (PT) with the native vacancy defects by the first-principles calculations. Firstly, the native vacancy defects of Pb, O and Ti in PT were investigated and it was found that Pb vacancy is preferred to others. And then the growth of Mn doped PT should be preferred to Mn ion substituting for an A-site Pb ion with +3 valence when Pb is deficient under equilibrium conditions driven solely by minimization of the formation energy, and this could result in a larger lattice distortion of PT. In addition, when Mn enters the Pb site, the electronegativity of O becomes weaker which makes the domain movement easier in PT to improve the performance of PT, while Mn ion substitution for a B-site Ti ion is the opposite.

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A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

Wan,

Liu,

Zheng

et al. 2023

Adv Funct Materials

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Acoustic devices play an increasingly important role in modern society for information technology and intelligent systems, and recently significant progress has been made in the development of communication, sensing, and energy transduction applications. However, conventional material systems, such as polymers, metals and silicon, show limitations to fulfill the evolving requirements for high‐performance acoustic devices of small size, low power consumption, and multifunctional capabilities. 2D materials hold the promise in overcoming the development bottleneck of acoustic devices aforementioned, given their atomic‐thin thickness, extensive surface area, superior physical properties, and remarkable layer‐stacking tunability. By suspending the 2D materials, mechanical and thermal disruption from substrate will be eliminated, which will enable the development of new classes of acoustic devices with unprecedented sensitivity and accuracy. In this review, the recent progress of acoustic devices based on suspended 2D materials and their composites, especially applications in the audio frequency, static pressure, and ultrasonic frequency range, is briefly summarized, emphasizing the advantageous properties of suspended 2D materials and related outstanding device performance. Together with the development of 2D membrane synthesis, transfer, as well as microelectromechanical fabrication process, suspended 2D materials will shed light on the next‐generation high‐performance acoustic devices.

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A high-SPL piezoelectric MEMS loud speaker based on thin ceramic PZT

Cited by 47 publications

References 19 publications

Review of Recent Development of MEMS Speakers

Review of Recent Development of MEMS Speakers

Mn ions' site and valence in PbTiO3 based on the native vacancy defects

A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

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