A highly linear piezoelectric quasi-static MEMS mirror with mechanical tilt angles of larger than 10°

Gu-Stoppel, Shanshan; Lisec, T.; Fichtner, Simon; Funck, Nico; Eisermann, C.; Lofink, Fabian; Wagner, Bernhard; Müller-Groeling, Axel

doi:10.1117/12.2509577

Cited by 22 publications

(14 citation statements)

References 4 publications

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“…Thus, a smaller and cheaper actuator is desirable for the realization of this type of mirror, and a spring-supported scanning mirror has been considered as an alternative to the rotating polygon mirror. Electrostatic force [13][14][15][16], electrothermal force [17][18][19][20], electromagnetic force [21][22][23][24][25][26], and piezoelectric force [27][28][29][30][31][32] have been studied as the driving principles of the mirrors. Among these, electrostatic, electromagnetic, and piezoelectric drives are promising based on their response speed.…”

Section: Introductionmentioning

confidence: 99%

Highly Linear and Wide Non-Resonant Two-Degree-of-Freedom Piezoelectric Laser Scanner

Ozaki

Ohta

Fujiyoshi

2022

Sensors

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Laser scanners with mechanically driven mirrors have exhibited increasing potential for various applications, such as displays and laser radar. Resonant scanners are the predominantly used scanners; however, non-resonant scanners are required for applications where point-to-point driving is desirable. Because a non-resonant drive cannot amplify the drive angle owing to the resonance phenomenon, high values are difficult to achieve for the main performance metrics of the scanners: mirror area, drive angle, and operating frequency. In this paper, we present a two-axis scanner with a piezoelectric actuator made of a piezoelectric single-crystal Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 as the actuation force source. The scanner contains a circular mirror with a diameter of 7 mm and achieves an average static mechanical deflection angle amplitude of 20.8° in two axes with a resonant frequency of 559 Hz. It is equipped with a transmission mechanism that can decouple each axis to achieve high linearity; in our study, the nonlinearity error was less than 1°.

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Section: Introductionmentioning

confidence: 99%

Highly Linear and Wide Non-Resonant Two-Degree-of-Freedom Piezoelectric Laser Scanner

Ozaki

Ohta

Fujiyoshi

2022

Sensors

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“…There are different actuation mechanisms that have been used to generate motion on micromirror devices, including piezoelectric [15][16][17], electromagnetic [18][19][20], electrostatic [1,8,[21][22][23], and electrothermal [24][25][26]. Additionally, there has been work on high energy density (HED) materials [27] such as vanadium dioxide (VO 2 ) [13,28] and shape memory alloy (SMA) [29].…”

Section: Introductionmentioning

confidence: 99%

Design, Simulation, Fabrication, and Characterization of an Electrothermal Tip-Tilt-Piston Large Angle Micromirror for High Fill Factor Segmented Optical Arrays

et al. 2021

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Micro-electromechanical system (MEMS) micromirrors have been in development for many years, but the ability to steer beams to angles larger than 20° remains a challenging endeavor. This paper details a MEMS micromirror device capable of achieving large motion for both tip/tilt angles and piston motion. The device consists of an electrothermal actuation assembly fabricated from a carefully patterned multilayer thin-film stack (SiO2/Al/SiO2) that is epoxy bonded to a 1 mm2 Au coated micromirror fabricated from an SOI wafer. The actuation assembly consists of four identical actuators, each comprised of a series of beams that use the inherent residual stresses and coefficient of thermal expansion (CTE) mismatches of the selected thin films to enable the large, upward, out-of-plane deflections necessary for large-angle beamsteering. Finite element simulations were performed (COMSOL v5.5) to capture initial elevations and tip/tilt motion displacements and achieved <10% variance in comparison to the experiment. The measured performance metrics of the micromirror include tip/tilt angles of ±23°, piston motion of 127 µm at sub-resonance, and dynamics characterization with observed resonant frequencies at ~145 Hz and ~226 Hz, for tip/tilt and piston motion, respectively. This unique single element design can readily be scaled into a full segmented micromirror array exhibiting an optical fill-factor >85%, making it suitable for optical phased array beam control applications.

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“…Electrostatic [ 15 , 16 , 17 , 18 ], electrothermal [ 19 , 20 , 21 , 22 ], electromagnetic [ 23 , 24 , 25 , 26 , 27 , 28 ], and piezoelectric [ 29 , 30 , 31 ] forces have been reported as actuation alternatives for miniaturized laser scanners. Among these, electrostatic, electromagnetic, and piezoelectric are suitable for driving large mirrors rapidly owing to their high response speeds.…”

Section: Introductionmentioning

confidence: 99%

Wide Two-Degree-of-Freedom Static Laser Scanner with Miniaturized Transmission Mechanism and Piezoelectric Actuation

Ozaki

Ohta

Fujiyoshi

2021

Sensors

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In recent years, laser scanners have attracted significant attention for applications such as laser radars. However, the establishment of a two-degree-of-freedom scanner that can quasi-statically drive a large mirror with a large deflection angle has proven to be challenging. In this paper, we propose a laser scanner design and fabrication method by combining two unimorph piezoelectric actuators composed of piezoelectric single-crystal Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 and a miniature translation-rotation conversion mechanism with flexible polyimide hinges. The size of the entire scanner was 32 mm × 12 mm × 10 mm. We successfully demonstrated that the scanner could achieve a large quasi-static mechanical deflection angle amplitude of 20.5° in two axes with a 6-mm-square mirror.

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A highly linear piezoelectric quasi-static MEMS mirror with mechanical tilt angles of larger than 10°

Cited by 22 publications

References 4 publications

Highly Linear and Wide Non-Resonant Two-Degree-of-Freedom Piezoelectric Laser Scanner

Highly Linear and Wide Non-Resonant Two-Degree-of-Freedom Piezoelectric Laser Scanner

Design, Simulation, Fabrication, and Characterization of an Electrothermal Tip-Tilt-Piston Large Angle Micromirror for High Fill Factor Segmented Optical Arrays

Wide Two-Degree-of-Freedom Static Laser Scanner with Miniaturized Transmission Mechanism and Piezoelectric Actuation

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