A History of Surface Acoustic Wave Devices

Morgan, D.P.

doi:10.1016/s0129-1564(00)00059-3

Cited by 9 publications

(2 citation statements)

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“…3 The growth conditions of the films are shown in Table 7. Figure 4 shows the velocity dispersion characteristics of these four different PECVD films deposited to a thickness of 500 nm on gallium arsenide, determined from transmission frequency spectra like that shown in Fig.…”

Section: Pecvd Dielectric Films On Gallium Arsenidementioning

confidence: 99%

Thin-Films for Saw Devices

Hickernell

2000

Int. J. Hi. Spe. Ele. Syst.

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Thin-films play a significant role in surface acoustic wave (SAW) technology. Thin metal films are essential for the generation and detection of SAWs on piezoelectric substrates, can provide for directional control, influence the velocity and propagation loss, and can be configured to produce a wide variety of time and frequency signal processing functions for electronic systems. Dielectric films have been used to selectively modify the propagation properties of surface waves, protect the surface, and improve the coupling efficiency and temperature characteristics of SAW devices. Piezoelectric films have extended SAW device developments to amorphous and nonpiezoelectric crystals for enhanced frequency and loss performance, lower cost, and microelectronic integration. Semiconductor, optical, and magnetic films have shown promise for active acoustoelectronic, acoustooptic, and magnetoacoustic devices. Chemically sensitive films are the basis for SAW sensor developments. Active research continues today in improving the properties and utilization of thin films on SAW substrates through advances in processing and characterization. Thin-Films for SAW Devices 605 Table 1 .Thin Metal Patterns on a Piezoelectric Plate for SAW Device Development.

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Section: Pecvd Dielectric Films On Gallium Arsenidementioning

confidence: 99%

Thin-Films for Saw Devices

Hickernell

2000

Int. J. Hi. Spe. Ele. Syst.

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“…Since interdigital transducers were introduced for transmitting and receiving surface acoustic waves (SAW) (White and Voltmer, 1965), SAW devices have been widely employed in electronic systems and sensors (Morgan, 2000;Drafts, 2001). In these applications, Rayleigh-type SAW devices are primarily used; however, piezoelectric shear-horizontal-type (SH) SAWs have frequently been adopted in recent years to achieve high performance (Kadota et al, 2001;Sehra et al, 2004).…”

Section: Introductionmentioning

confidence: 99%

Properties of Love waves in layered piezoelectric structures

Liu

2010

International Journal of Solids and Structures

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a b s t r a c tLove waves propagating in a layered structure with an elastic layer deposited on a piezoelectric substrate are analytically investigated. We present a general dispersion equation that describes the properties of Love waves in the structure. A detailed discussion regarding the dispersion equation is presented, and the parameters for Love-mode sensors are also introduced. The properties of Love waves are illustrated by means of sample results for a layered structure with an SiO 2 layer sputtered on an ST-cut 90°X-propagating quartz substrate. Interestingly, we found that a threshold-normalized layer thickness existed for the fundamental Love mode in such a structure.

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