A hybrid probe system for quantifying plasma parameters in a 13.56 MHz capacitive coupled magnetized plasma

Abstract

A hybrid probe comprising of a combination of dual cylindrical and an emissive probe is developed to characterize magnetized plasma parameters in a 13.56 MHz capacitive coupled radio-frequency (RF) discharge, operated in push-pull configuration. The obtained plasma density has been verified against a standard resonance hairpin probe. It is found that under weak magnetic field, the plasma densities are in good agreement with the hairpin probe but deviate as the magnetic field increases. A brief discussion has been presented to explain this feature. The advantage of a hybrid probe circuit over the conventional triple Langmuir probe operated in RF plasma is also discussed.