A hybrid scanning probe microscope (SPM) module based on a DVD optical head

Abstract

The development of a highly sensitive (sub-nanometer) and multi-platform scanning probe microscope (SPM) module is presented. The module is based on an optical DVD pick-up head and uses its astigmatic detection scheme to detect the vertical displacement of the SPM cantilevers. The complete hybrid SPM module is capable of scanning in SPM intermittent contact, SPM contact and optical profilometry modes. The module can be used in a modified optical microscope or be implemented in a stand-alone system. Measurement results prove that the mechanical stability of this SPM module is high enough for atomic resolution imaging. Both scanning-sample and scanning-probe-type SPM setups have been tested based on this SPM module. The noise level and drift rate in the z-direction of the stand-alone system are 10 pm (rms) and 0.2 nm min −1 , respectively.

Biophysical Analysis of Astrocytes Apoptosis Triggered by Larval E/S Antigen from Cerebral Toxocarosis-Causing Pathogen Toxocara canis

“…Figure 1(a) illustrates the optical configuration of the astigmatic detection method. [20][21][22][23][24] A laser beam focuses onto the sample through a collimator and an objective lens. The reflective laser beam is detected by a photo detector integrated chip (PDIC).…”

“…[20][21][22] Previously, Hwu et al developed a hybrid scanning probe microscopy (SPM) module based on a DVD pickup head. 23 The DVD pickup head offers the advantages of a small laser spot size, light weight, compactness, and low cost. When the DVD pickup head detects the deflection of the AFM cantilever, this hybrid SPM can execute the AFM module.…”

A novel method for quantitative height measurement based on an astigmatic optical profilometer

“…To combine the advantages of both contact and noncontact measurements, Hwu et al proposed a hybrid system based on an astigmatic detection system (ADS) [15]. The key component of the ADS is a commercial DVD pickup head, which has the advantages of compact size, low cost, small laser spot size, and easy alignment.…”

Reciclaje Tecnológico al Servicio de la Ciencia

“…Hwu et al (2006) utilizaron el mismo sistema modificando un microscopio comercial mediante la sustitución de su módulo de deflexión de haz por la cabeza de un lector óptico de CD/DVD. Hwu et al (2009) presentaron el desarrollo de un módulo híbrido que combinaba un modo de barrido y un modo óptico (perfilometría óptica), en una sola cabeza de sensor. En el modo de barrido, el láser enfocado medía la posición de la sonda.…”