Abstract:Liquid metal ion sources offer potential improvement in lateral resolution over conventionally used gaseous sources for MeV microprobe applications because of their intrinsic brightnesses. The use of a Li liquid metal ion source is particularly attractive because of the increased sensitivity of lithium for detecting hydrogen (hydrogen profiling) and for detecting near surface contaminants through highresolution Rutherford backscattering spectrometry. However, the technical difficulty of occasional sparking bet… Show more
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