A low loss and power efficient micro-electro-thermally actuated RF MEMS switch for low power and low loss applications

Zolfaghari, Parviz; Arzhang, Vahid; Zolfaghari, Mehdi

doi:10.1007/s00542-017-3684-2

Cited by 12 publications

(9 citation statements)

References 68 publications

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“…The actuator is fabricated by 20 μm thick Ni connected with an Au-plated tip to enhance the contact effect. The DC power consumption is 250 mW for a displacement of 32 μm in 14 ms. Zolfaghari P et al [13] have studied a kind of electrothermally driven bistable RF MEMS switch with low power consumption, as shown in Figure 13. The MetalMUMPs technology was also adopted and the structure layer was made of Ni.…”

Section: Electrothermal Switchmentioning

confidence: 99%

“…Au film of 1-3 µm is deposited on the surface of the contactors by electroplating to reduce contact resistance. The driving voltages are no more than 1 V, and the contact resistance is 0.028 Ω. Zolfaghari P et al [13] have studied a kind of electrothermally driven bistable RF MEMS switch with low power consumption, as shown in Figure 13. The MetalMUMPs technology was also adopted and the structure layer was made of Ni.…”

Section: Electrothermal Switchmentioning

confidence: 99%

“…A great deal of effort has been made to address the shortcomings of electrothermal switches. Similar to switches with other driving principles, bistable systems are frequently used for their low power consumption [13,[40][41][42]139,140]. The response speed of MEMS switches can be improved by the actuator optimization of geometry, material properties and driven voltage.…”

Section: Electrothermal Switchmentioning

confidence: 99%

“…The rise of MEMS switches provides strong technical support for the development of signal control systems. At present, the demand for MEMS switches mainly comes from military security systems [ 4 , 5 , 6 , 7 ], the automobile industry [ 8 , 9 ], the wireless communication field [ 10 , 11 , 12 , 13 , 14 , 15 ], medical apparatus and instruments [ 9 , 16 ], micro-optical electromechanical systems (MOEMS) [ 17 , 18 , 19 ] and more. Over the last few decades, various types of MEMS switches have been developed.…”

Section: Introductionmentioning

confidence: 99%

“…The electrothermal actuated bistable MEMS switch (Zolfaghari P et al 2018[13]): (a) the schematic view; (b) the close-up of the switching tip.…”

mentioning

confidence: 99%

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Research Status and Development Trend of MEMS Switches: A Review

Cao

Zhao

2020

Micromachines

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MEMS switch is a movable device manufactured by means of semiconductor technology, possessing many incomparable advantages such as a small volume, low power consumption, high integration, etc. This paper reviews recent research of MEMS switches, pointing out the important performance indexes and systematically summarizing the classification according to driving principles. Then, a comparative study of current MEMS switches stressing their strengths and drawbacks is presented, based on performance requirements such as driven voltage, power consumption, and reliability. The efforts of teams to optimize MEMS switches are introduced and the applications of switches with different driving principles are also briefly reviewed. Furthermore, the development trend of MEMS switch and the research gaps are discussed. Finally, a summary and forecast about MEMS switches is given with the aim of providing a reference for future research in this domain.

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Section: Electrothermal Switchmentioning

confidence: 99%

Section: Electrothermal Switchmentioning

confidence: 99%