A Low Power Cantilever-Based Metal Oxide Semiconductor Gas Sensor for Green House Applications

Abstract

This paper discuss about the detection of gas using MEMS. The main purpose is to design a metal oxide semiconductor based gas sensor with different types of cantilevers We simulated a design with cylindrical, rectangular and we compare the results. By gas detection from the circuit, there has been wide measurement range and high resolution to fulfill an gas sensor. A width of 10μ cantilever on which a sensing material is used and placed on the platinum micro heater without coil, which will provide less consumption of power and better heating with in less time. The circuit has been designed with a metal-oxide semiconductor technology to reduce the power consumption and suggest the best physical architecture