2012
DOI: 10.3791/4399
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A Method to Fabricate Disconnected Silver Nanostructures in 3D

Abstract: The standard nanofabrication toolkit includes techniques primarily aimed at creating 2D patterns in dielectric media. Creating metal patterns on a submicron scale requires a combination of nanofabrication tools and several material processing steps. For example, steps to create planar metal structures using ultraviolet photolithography and electron-beam lithography can include sample exposure, sample development, metal deposition, and metal liftoff. To create 3D metal structures, the sequence is repeated multi… Show more

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Cited by 6 publications
(7 citation statements)
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“…The EDS data indicate that fabricated dots are composed of silver. Furthermore, the SEM image shows a smoother structure to previous reports [16][17][18][19][20][21][22]. The silver signal from the spectrum is also significantly stronger than any previously reported for the silver direct laser writing method [16][17][18][19][20][21].…”
Section: Resultssupporting
confidence: 44%
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“…The EDS data indicate that fabricated dots are composed of silver. Furthermore, the SEM image shows a smoother structure to previous reports [16][17][18][19][20][21][22]. The silver signal from the spectrum is also significantly stronger than any previously reported for the silver direct laser writing method [16][17][18][19][20][21].…”
Section: Resultssupporting
confidence: 44%
“…Figure 2 shows a SEM image of an array of silver dots with sub-100 nm size, which is smaller than any other previously reported direct metal writing results [16][17][18][19][20][21][22]. We observed silver structures with diameters as small as 80 nm.…”
Section: Resultsmentioning
confidence: 67%
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“…So in addition to the material properties, laser parameters also need to be optimized to target different types of applications. [72,80,81]…”
Section: Resolutionmentioning
confidence: 99%