Microfluidics is increasingly applied to chemical and biological research, including drug discovery and development This chapter gives an overview of the commonly used microfabrication methods and materials as well as microfluidic (bio)analytical techniques available for the in vitro safety assessment of pharmaceutical nano-and microsystems. A general overview will be given to the evolution of microfabrication methods and materials, which have facilitated the progressive development of microfluidic cell culture platforms (so called organ-on-a-chips), immobilized enzyme microreactors, and integrated separation systems (for chemical analysis). Of these techniques, the organ-on-a-chips are so far the most applied microfluidic concept in safety evaluation of pharmaceutical nano-and microsystems, whereas the other two represent techniques that could benefit the field in the future by enabling in-depth mechanism-based studies with respect to, e.g., improved hepatic safety.