A Miniature Liquid Flowmeter Using All-Fiber Fabry–Perot Cavity for Real-Time Measurement

Abstract

A miniature and highly sensitive fiber-optic liquid flowmeter based on Fabry–Perot interferometry (FPI) is proposed and demonstrated for fluid-flow micro-channel testing. The diaphragm deformation and pressure of the proposed sensor for flow rate detection are obtained from numerical and finite element method simulations of the theoretical model. The FPI flowmeter can be applied in real time to measure the ultra-wide dynamic range from 0 mL/min to 90 mL/min, with a response time of hundreds of milliseconds, controlling the flow rate with a resolution of 1.08 mL/min, which is 1.2% of the full scale. The quadratic functional relation between dip wavelength shifts and flow rates is verified by the flow calibration curves of the FPI flowmeter under dynamic pressure conditions. In addition, the effective temperature compensation is realized by connecting an FBG temperature sensor for variable temperature flow detection, and the measured error is reduced by nearly 25-times. The proposed sensor has the potential to measure the liquid flow rate in various applications.