A miniaturized fluorescence detection system with an integrated organic light emitting diode

Abstract

The organic light emitting diode (OLED) is proposed as a novel source in the microchip because it has ideal merits (various wavelengths, thin-film structure and overall emitting) for the integration. In this paper, we fabricated finger-type PIN photodiodes for the fluorescence detection and an advanced microchip with an integrated OLED. The finger-type in the diode design extended the depletion region and its internal resistance was reduced about 32% than that of a rectangular-type. The photodiodes had 0.1 nA leakage current and 8,720 sensitivity (ILight/IDark) at -1 V bias. The interference filter with 32 layers (SiOz, Ti&) was directly deposited on the photodiode. Deposited OLEDs increased the excitation efficiency and extremely simplified the integration process. The monolithically integrated microchip had a high sensitivity of 0.256 nA/pM and the LOD (Limit of Detection, S/N =2) of 0.01 pM.

Fabrication and Mechanical Characterization of Micro Electro Mechanical System Based Vertical Probe Tips for Micro Pad Measurements

“…Because C4 type devices typically have an irregular arrangement, vertical type probe cards are required to measure them. [1][2][3] In addition, horizontally-oriented cantilever type probe cards have poor high frequency characteristics compared to vertical type probe cards. New designs of a vertical probe array for C4 type devices with pitches of 250 and 175 mm have been developed.…”

“…New designs of a vertical probe array for C4 type devices with pitches of 250 and 175 mm have been developed. 1,2) However, these vertical type probes are not ideal because the size of the single tip is too big to measure micro-pitched devices measuring less than 100 mm.…”