1989
DOI: 10.1088/0953-8984/1/sb/053
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A multipurpose UHV manipulator for surface studies

Abstract: A large substrate manipulator allowing temperature variation between 80 and 870 K while providing 2D translation and tilt capabilities is outlined.

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Cited by 2 publications
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“…In order to mount the assembly of substrate holder and temperature controller, the geometry of system was almost restricted by the size of the bell jar, the position of the crucible and the flange permitting access into the vacuum chamber (figure 1). The substrate holder and its accessories are described in [20].…”
Section: Methodsmentioning
confidence: 99%
“…In order to mount the assembly of substrate holder and temperature controller, the geometry of system was almost restricted by the size of the bell jar, the position of the crucible and the flange permitting access into the vacuum chamber (figure 1). The substrate holder and its accessories are described in [20].…”
Section: Methodsmentioning
confidence: 99%