A new bifunctional topography and current probe for scanning force microscope testing of integrated circuits

Articles you may be interested inDevelopment of magnetoresistive thin film sensor for magnetic field sensing applications AIP Conf. Proc. 1512, 30 (2013); 10.1063/1.4790897 Domain wall displacement in Py square ring for single nanometric magnetic bead detection Magnetism in zigzag-shaped thin-film elements is investigated using scanning electron microscopy with polarization analysis, magnetotransport measurements, and micromagnetic simulations. We find that the angle of magnetization alternates along the length of the element, and is strongly correlated to the corrugated edges. We show that this simple and unique geometry can be used as a single-axis magnetic field sensor. In this configuration, the sensors are primarily sensitive to fields parallel to the applied current. Our results can be interpreted in terms of a coherent rotation model of the magnetization. These devices are scalable to nanometer dimensions.

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A new bifunctional topography and current probe for scanning force microscope testing of integrated circuits

Cited by 6 publications

References 6 publications

Three-dimensional fuzzy influence analysis of fitting algorithms on integrated chip topographic modeling

Three-dimensional fuzzy influence analysis of fitting algorithms on integrated chip topographic modeling

Scanning probe microscopy in semiconductor failure analysis

Zigzag-shaped magnetic sensors

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