Microsc Microanal
 2020
DOI: 10.1017/s1431927620014580
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A New Generation Plasma FIB Column with Higher Probe Current and Improved Imaging Resolution

Tomáš Hrnčíř
1
,
D. Nespor
2
,
Zsolt Radi
3
et al.

Abstract: This is an Accepted Manuscript for the Microscopy and Microanalysis 2020 Proceedings. This version may be subject to change during the production process.

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Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications

Li
1
,
Chen
2
,
Dai
3
et al. 2021
Nanoscale
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Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications

Li
1
,
Chen
2
,
Dai
3
et al. 2021
Nanoscale
189
0
100
0
View full textAdd to dashboardCite
show abstract
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