A New High-Resolution Electron Microscope with Easy Operation System for Nano Analysis

Abstract

In recent years, circuit integration and density of semiconductor devices are rapidly increased by the advance of manufacturing technology. SEM is in a common wide use for the evaluation of semiconductor processes in the product fabrication. However, the observation by using SEM has become gradually difficult because of smaller design rules. Accordingly, a new high-resolution electron microscope having the functions of TEM, STEM and SE (Secondary Electron) image is required. It is possible to easily observe for the high-resolution image by using TEM function in comparison with using STEM function. Moreover, the operation should be easy, and the result of observation and analysis should be as rapid and accurate as possible. The JEM-2500SE Nano analysis electron microscope has been developed in order to satisfy such requirements. Figure 1 shows an outer view of the JEM-2500SE. It is an electron microscope of accelerating voltage 200kV with Schottky type field emission electron gun. Specifications of JEM-2500SE are shown in Table 1. The advantages of this new microscope are described in the following.