A new laser micromachining technique using a mixed-mode ablation approach

Micromachined WR 3.4 waveguide circuits are fabricated using a SU-8 micromachining process. In order to demonstrate the viability and repeatability of this process both straight waveguide sections and cylindrical cavity resonators are fabricated and measured. The SU-8 waveguide compares reasonably well to a standard WR 3.4 waveguide section. The measured cavity resonators demonstrate quality factors of 1900 and 2200 at a resonant frequency of 308 GHz.

show abstract

A disposable polymer field effect transistor (FET) for pH measurement

Gao

Zhu

Choi

et al.

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (

Self Cite

View full text Add to dashboard Cite

In this paper, a fully disposable polymer field effect transistor (polymer-FET) for pH measurement has been proposed, fabricated and fully characterized. A welldefined poly (3-hexylthiophene) (P3HT) is adopted as the semi-conducting material and used as active layer. The polymer FET fabricated on a plastic substrate shows I-V characteristics that are comparable to those of Si-based field effect transistor (Si-FET). The polymer FET sensor has been integrated with a microfluidic channel and tested as a pH sensor, which shows a good linearity in the source-drain current versus the pH concentration. This work has envisaged a possibility of mass-producing low cost and disposable polymer sensordcircuits. Due to the low temperature process, the polymer-FET can he easily integrated with disposable lab-on-a-chips. 0-7803-7731 -1/03/$17.00 02003 IEEE

show abstract

A new laser micromachining technique using a mixed-mode ablation approach

Cited by 5 publications

References 7 publications

Laser microfabrication of long thin holes on biodegradable polymer in vacuum for preventing clogginess and its application to blood collection

Laser microfabrication of long thin holes on biodegradable polymer in vacuum for preventing clogginess and its application to blood collection

SU-8 micromachining of millimeter and submillimeter waveguide circuits

A disposable polymer field effect transistor (FET) for pH measurement

Contact Info

Product

Resources

About