A new twist on glass: A brittle material enabling flexible integrated photonics

Li, Lan; Lin, Hongtao; Michon, Jérôme; Huang, You; Li, Junying; Du, Qingyang; Yadav, Anupama; Richardson, Kathleen; Gu, Tian; Hu, Juejun

doi:10.1111/ijag.12256

Cited by 34 publications

(26 citation statements)

References 45 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The SU-8 membrane can be delaminated from the handler substrate after detector fabrication to form free-standing flexible devices. This process, which has previously been adopted for flexible ChG photonic device fabrication by the authors [61][62][63][64][65] , capitalizes on the low deposition and processing temperatures of ChG's to facilitate direct integration on polymers which typically cannot withstand temperatures above 250 °C. The Ge23Sb7S70 glass waveguide dimensions are as follows: ridge width 0.8 m, slab thickness 0.13 m and ridge height 0.3 m.…”

Section: Section XII -Fabrication and Characterization Of Flexible Wamentioning

confidence: 99%

Chalcogenide glass-on-graphene photonics

et al. 2017

Self Cite

View full text Add to dashboard Cite

Two-dimensional (2-D) materials are of tremendous interest to integrated photonics given their singular optical characteristics spanning light emission, modulation, saturable absorption, and nonlinear optics. To harness their optical properties, these atomically thin materials are usually attached onto prefabricated devices via a transfer process. In this paper, we present a new route for 2-D material integration with planar photonics. Central to this approach is the use of chalcogenide glass, a multifunctional material which can be directly deposited and patterned on a wide variety of 2-D materials and can simultaneously function as the light guiding medium, a gate dielectric, and a passivation layer for 2-D materials. Besides claiming improved fabrication yield and throughput compared to the traditional transfer process, our technique also enables unconventional multilayer device geometries optimally designed for enhancing light-matter interactions in the 2-D layers. Capitalizing on this facile integration method, we demonstrate a series of highperformance glass-on-graphene devices including ultra-broadband on-chip polarizers, energyefficient thermo-optic switches, as well as graphene-based mid-infrared (mid-IR) waveguideintegrated photodetectors and modulators.

show abstract

Section: Section XII -Fabrication and Characterization Of Flexible Wamentioning

confidence: 99%

Chalcogenide glass-on-graphene photonics

et al. 2017

Self Cite

View full text Add to dashboard Cite

show abstract

“…The design concept has gradually been applied to fabricate flexible and stretchable photonic sensors. Li et al developed a stretchable serpentine‐shaped waveguide based on brittle glass, as shown in Figure a . The flexible integrated waveguide could be bent, twisted, and stretched.…”

Section: Structural Design For Stretchabilitymentioning

confidence: 99%

Flexible and Stretchable Photonic Sensors Based on Modulation of Light Transmission

Wang

2019

Advanced Optical Materials

View full text Add to dashboard Cite

Emerging technologies, such as soft robotics, electronic skin, wearable devices, and flexible display, demand the practical application of photonic sensors that are bendable and stretchable, as conventional photonic sensors are fabricated with rigid materials and substrates, rendering their applications in deformable state or soft systems infeasible. Thus, the development of flexible and stretchable photonic sensors, which can be wrapped onto curved surfaces and easily deformed into different shapes and sizes, has inspired great research interest. This article presents recent progress in the development of flexible and stretchable photonic sensors, particularly photonic sensors based on the modulation of light transmission, from the aspects of materials synthesis and selection, structure design, fabrication methods, sensing characteristics, and performances. The challenges and future research opportunities related to flexible and stretchable photonic sensors and their potential application prospects are also discussed.

show abstract

“…The PDMS layer functions as the substrate, whereas SU-8, having an intermediate CTE of 52 ppm, is sandwiched between Ge23Sb7S70 glass and PDMS to relieve thermal stress caused by the CTE mismatch between PDMS and glass. at 0% strain and (c) the same device at 36% tensile strain; (d) measured optical loss in a microresonator prior to and after a mechanical fatigue test consisting of 3,000 stretching cycles at 42% tensile strain (33). Fig.…”

Section: Stretchable Integrated Photonicsmentioning

confidence: 99%

(Invited) Mechanically Flexible Integrated Photonic Systems for Sensing and Communications

Yadav¹,

Richardson²,

Li³

et al. 2017

Meet. Abstr.

Self Cite

View full text Add to dashboard Cite

Conventional integrated photonic devices are fabricated on rigid semiconductor or dielectric substrates and are therefore inherently incompatible with soft biological tissues. Over the past few years, we have developed a suite of active and passive photonic devices and systems integrated on plastic substrates which can be bent, twisted, and stretched without compromising their optical performance. In this talk, we will review the latest progress in multi-material photonic integration on unconventional flexible substrates, and discuss emerging applications of flexible photonics in biological sensing and high-bandwidth data communications.

show abstract

A new twist on glass: A brittle material enabling flexible integrated photonics

Cited by 34 publications

References 45 publications

Chalcogenide glass-on-graphene photonics

Chalcogenide glass-on-graphene photonics

Flexible and Stretchable Photonic Sensors Based on Modulation of Light Transmission

(Invited) Mechanically Flexible Integrated Photonic Systems for Sensing and Communications

Contact Info

Product

Resources

About