A normal tracking differential confocal measurement method for multiple geometric parameters of hemispherical shell resonator with a common reference

Abstract

This paper proposes a normal tracking differential confocal measurement method for the inside and outside surface profiles, shell thickness uniformity, and central asymmetry of inside and outside surfaces of the hemispherical shell resonator (HSR). A differential confocal technique with high-transmittance focusing ability is used to measure a single point on the inside and outside surfaces of the HSR. The normal alignment measurement technique is used to accurately measure the inside and outside surfaces and shell thickness of the HSR with a common reference in one measurement process. The HSR is step-rotated to synchronously collect information on the inside and outside surfaces, and using the differential confocal sensor to measure the different normal-section profiles. The experimental results indicate successful measurement of HSR central asymmetry. The repeated measurement accuracy for the inside and outside surface profiles and thickness uniformity is better than 30 nm.