A Novel Fabrication Process for Thin, Flexible, Backside-accessible Polymer-based CMUTs for Acoustic Emission Sensing

Welsch, Jonas; Gerardo, Carlos D.; Rohling, Robert; Cretu, Edmond

doi:10.1109/ius51837.2023.10306843

2023 IEEE International Ultrasonics Symposium (IUS) 2023

DOI: 10.1109/ius51837.2023.10306843

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A Novel Fabrication Process for Thin, Flexible, Backside-accessible Polymer-based CMUTs for Acoustic Emission Sensing

Jonas Welsch,

Carlos D. Gerardo,

Robert Rohling

et al.

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Preliminary Demonstration of Pulse-Echo Imaging With a Long Monolithic Flexible CMUT Array

Omidvar,

Rohling,

Cretu

et al. 2024

IEEE Open J. Ultrason., Ferroelect., Freq. Contr.

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Preliminary Demonstration of Pulse-Echo Imaging With a Long Monolithic Flexible CMUT Array

Omidvar,

Rohling,

Cretu

et al. 2024

IEEE Open J. Ultrason., Ferroelect., Freq. Contr.

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A Novel Fabrication Process for Thin, Flexible, Backside-accessible Polymer-based CMUTs for Acoustic Emission Sensing

Cited by 1 publication

References 8 publications

Preliminary Demonstration of Pulse-Echo Imaging With a Long Monolithic Flexible CMUT Array

Preliminary Demonstration of Pulse-Echo Imaging With a Long Monolithic Flexible CMUT Array

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