A novel methodology to assess optical profilometer stability to discriminate surface roughness

Abstract

A new method is proposed to investigate the measurement variation of instruments and their ability to discriminate two TA6V surfaces obtained by grinding with SiC grit papers (80 and 120). Three optical measurement technologies included into a single apparatus, namely Confocal Microscopy (CM), Focus Variation (FV) and Coherence Scanning Interferometry (CSI), were used to measure both ground surfaces according to a specific experimental protocol (MorphoMeca Monitoring) based on measurement iterations and repetitions. From the measurements, four indices were built from the Sa roughness parameter to assess the Quality (ratio of the topographical variability over the measurement noise), the Drift (related to surface fluctuations) and the Stability (estimation of the temporal drift using a second order autoregressive model) of the three measurement technologies (modes), as well as their
Relevance (computed from an analysis of variance) to discriminate ground surfaces with close roughness. For these investigated surfaces, it was especially highlighted that the Quality Index is four times higher for the CSI mode than for the FV and CM modes. All the used measurement modes experienced small drifting (Drift Index) during the measurements. The CSI mode was slightly more sensitive to drift than the FV and CM modes. The Stability Index indicated that there was no memory effect between two acquisitions for each measurement mode, i.e., the temporal drift did not depend on the measurement mode. Moreover, the three measurement
modes are able to discriminate the two ground surfaces with the same accuracy through the Sa parameter. However, the Sa values may vary depending on the measurement modes, and it was finally shown that the Sa parameter is minimized by 0.03 µm for the FV mode compared with the CSI mode, due to its smoothing effect.