A Novel Self-Temperature Compensation Method for Mode-Localized Accelerometers

Abstract

Mode-localized sensing paradigms applied to accelerometers have recently become popular research subjects. However, the output of mode-localized accelerometers is influenced by environment temperature due to the difference in the thermal properties of the coupling resonators and the temperature dependence of coupling stiffness. To improve the performance of mode-localized accelerometers against temperature, we proposed an in situ self-temperature compensation method by utilizing the resonant frequency besides of amplitude ratios, which can be implied online. Experimental results showed that there were nearly 79-times and 87-times improvement in zeros bias and scale factor, respectively.

Input–Output-Improved Reservoir Computing Based on Duffing Resonator Processing Dynamic Temperature Compensation for MEMS Resonant Accelerometer

“…However, temperature affects the performance of silicon-based sensors, so temperature compensation is crucial for providing reliable output. It is now commonly established that temperature compensation can be realized by device structure optimization at the hardware level [ 4 , 5 , 6 ], and frequency-temperature (f-T) modelling at the software level [ 7 , 8 , 9 ]. The hardware compensation methods usually require special structural topology and sophisticated fabrication technology [ 10 ], which suffer from high cost and power consumption.…”

Mode-localized temperature sensor with ultrahigh sensitivity

“…However, due to the existing MEMS processing conditions and structural design, the performance of resonant temperature sensors such as the sensitivity has encountered bottlenecks in improvement. For the past few years, a new sensitive mechanisms of mode localization effects have been used to the resonant sensors such as force sensors 8 , accelerometers 9 , displacement sensors 10 , mass sensors 11 , and charge sensors 12 , which have been proven to have ultra-high sensitivity and can effectively improve the performance of resonant sensors [13][14][15] . Mode localization effect refers to the fact that weak changes of system parameters can alter the state of the original uniform energy distribution, resulting in energy redistribution and being limited to a certain region in a tuned system 16,17 .…”