Abstract:We describe a novel stable piezoelectric nanopositioner which just use one piezoelectric stack and one simple driving signal, in which the central shaft is clamped by one BeCu spring and four SiN balls that bonded to the inner wall of the cylindrical tube. The cylindrical tube is fixed on the free end of the piezoelectric stack. Applying one increasing voltage signal on the piezoelectric stack, according to the principle of piezoelectricity, the piezoelectric stack will extend smoothly. When canceling this vol… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.