A Novel Structure for Design and simulation of a MEMS Resonator for Biomedical Applications

Abstract

Micro resonators have found a broad usage in mass sensing applications especially in biomedical field.This paper aimed to evaluate a micro resonator. In the design of micro resonators, some factors as micro resonator structure should be considered, actuator and applied cases as it has the highest effect on quality coefficient and consumption power and work frequency. This study at first designs resonator and investigates various structures. At first, a mechanical analysis is performed by Comsol 3.5 software on micro resonator to optimize it in terms of dimensions. The voltage of bias on micro resonator is 1.1V and switching time is 120 microseconds.