2008
DOI: 10.1016/j.snb.2007.10.047
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A novel technique for measuring pico-scale flow rate of a liquid solution using a microchannel

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Cited by 3 publications
(2 citation statements)
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“…Chang et al invented a method to fabricate microchannels capable of detecting flow rates without using a high temperature or high‐voltage process. Using aluminum electrodes at both ends of a microchannel, they were able to detect a flow rate as low as 9 pL s −1 . Ability to detect these small flow rates can enable engineers to fabricate devices employing extremely low flow rates to enhance sensing times and reduce the power required to flow fluids.…”
Section: Role Of Cmos In Microfluidicsmentioning
confidence: 99%
“…Chang et al invented a method to fabricate microchannels capable of detecting flow rates without using a high temperature or high‐voltage process. Using aluminum electrodes at both ends of a microchannel, they were able to detect a flow rate as low as 9 pL s −1 . Ability to detect these small flow rates can enable engineers to fabricate devices employing extremely low flow rates to enhance sensing times and reduce the power required to flow fluids.…”
Section: Role Of Cmos In Microfluidicsmentioning
confidence: 99%
“…Using aluminium electrodes at both ends of a microchannel, they were able detect a flow rate as low as 9 pL/s. [93] By using CMOS-compatible processes to make the device, it can be easily interfaced with readout electronics to form a single IC-SoC solution.…”
Section: Biological and Chemical Sensorsmentioning
confidence: 99%