A Precise SOI Film Thickness Measurement Including Gate Depletion and Quantum Effects

Yamaguchi, Kensuke; Onishi, H.; Imai, Ko; Kumashiro, S.; Horiuchi, T.

doi:10.7567/ssdm.1998.b-10-4

Extended Abstracts of the 1998 International Conference on Solid State Devices and Materials 1998

DOI: 10.7567/ssdm.1998.b-10-4

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A Precise SOI Film Thickness Measurement Including Gate Depletion and Quantum Effects

Kensuke Yamaguchi¹,

H. Onishi²,

Ko Imai³

et al.

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A Precise SOI Film Thickness Measurement Including Gate Depletion and Quantum Effects

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