A quadruply self-aligned MOS (QSA MOS) a new short channel high speed high density MOSFET for VLSI

Ohta, Kuniichi; Yamada, Kazuhiko; Shimizu, K.; Tarui, Yasuo

doi:10.1109/iedm.1979.189690

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A quadruply self-aligned MOS (QSA MOS) a new short channel high speed high density MOSFET for VLSI

Cited by 9 publications

References 4 publications

Hot-electron resistance device processing and design: a review

Hot-electron resistance device processing and design: a review

A new MOS transistor design with self-registering source-drain and gate contacts

New edge-defined vertical-etch approaches for submicrometer MOSFET fabrication

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