A method for simultaneous multi-element analysis of fly ash samples by inductively coupled plasma orthogonal acceleration time-of-flight mass spectrometry (oaTOF-ICP-MS) after closedvessel microwave extraction with ammonium fluoride was introduced here. Corrosive and and/or toxic acids like HF, HCl or HClO 4 , as well as HNO 3 , which are commonly used during sample preparation of the fly ash samples are avoided in this method. The spectral effects due to the formation of different Cl, Na, K, Ca, Mg, containing polyatomic species interfering the determination of number of elements like As, Se or Ni during the oaTOF-ICP-MS analysis are negligible. Under the optimum experimental extraction conditions evaluated using a fractional factorial design being 10 mg of the sample extracted with 5 mL of 140 g L −1 NH 4 F for 10 min at 200 °C, subsequent analysis of the resulting supernatant enabled under optimum instrumental conditions and with Rh as an internal standard precise and accurate simultaneous determination 2 of 11 elements (Li, Be, Ni, As, Se, Rb, Sb, Cs, W, Tl and U) at trace and ultra-trace levels. The accuracy was assessed by analysing two certified reference materials, namely Fine Fly Ash CTA-FFA-1 and Constituent Elements in Coal Fly Ash Standard Reference Material ® 1633b. The precision of the reported method was better than 10 %.