“…The xenon excimer lamps (λ 172 nm) are of widespread use because they can be made of quartz, without use of special materials for output windows. The VUV radiation of excimer lamps is used in technology for dry cleaning of surfaces in the semiconductor industry and in the manufacture of flat panel display 3) , for generation of ozone 4) , processing of polymer surfaces 5) , a research is accomplished on using them for water treatment 6) . Manufacturing of excimer VUV radiation sources is established by such companies as OSRAM, USHIO Inc., by a number of Russian enterprises (SOI, HCEI) and other ones.…”