A reproducible method for μm precision alignment of PDMS microchannels with on-chip electrodes using a mask aligner

Abstract

This paper describes a reproducible method for m precision alignment of polydimethylsiloxane (PDMS) microchannels with coplanar electrodes using a conventional mask aligner for lab-on-a-chip applications. It is based on the use of a silicon mold in combination with a PMMA sarcophagus for precise control of the parallelism between the top and bottom surfaces of molded PDMS. The alignment of the fabricated PDMS slab with electrodes patterned on a glass chip is then performed using a conventional mask aligner with a custom-made steel chuck and magnets. This technique allows to bond and align chips with a resolution of less than 2m.

Dielectrophoretic Separation of Particles Using Microfluidic Chip with Composite Three-Dimensional Electrode

“…The chip with Ag-PDMS composite 3D microelectrodes has broad application prospects in the field of microfluidics, e.g., the separation of different types of tumor cells and the development of on-chip Ag/AgCl reference electrodes for measuring the potential and pH in chip channels [ 42 ]. Additionally, owing to the flexibility of Ag-PDMS, the chlorinated composite material can be used to fabricate flexible electrodes for wearable devices [ 43 ] for detecting EEG or EMG signals without polarization phenomena.…”

Dielectrophoresis‐assisted creation of cell aggregates under flow conditions using planar electrodes

“…They were later aligned with the electrodes using a mask aligner. For more details on the fabrication process, see .…”

Planar hydrodynamic traps and buried channels for bead and cell trapping and releasing

“…The top layer fabrication, alignment and bonding were previously precisely described. 28 Shortly, PDMS is molded on a DRIE-etched silicon substrate, cured and punched (steps 2). The PDMS is then aligned and permanently bonded to the bottom substrate using a mask aligner (MJB4, Süss) (step 3).…”