In this paper, we propose an ultrascaled WS2 field-effect transistor equipped with a Pd/Pt sensitive gate for high-performance and low-power hydrogen gas sensing applications. The proposed nanosensor is simulated by self-consistently solving a quantum transport equation with electrostatics at the ballistic limit. The gas sensing principle is based on the gas-induced change in the metal gate work function. The hydrogen gas nanosensor leverages the high sensitivity of two-dimensional WS2 to its sur-rounding electrostatic environment. The computational investigation encompasses the nanosensor’s behavior in terms of potential profile, charge density, current spectrum, local density of states (LDOS), transfer characteristics, and sensitivity. Additionally, the downscaling-sensitivity trade-off is analyzed by considering the impact of drain-to-source voltage and the electrostatics parameters on subthreshold performance. The simulation results indicate that the downscaling-sensitivity trade-off can be optimized through enhancements in electrostatics, such as utilizing high-k dielectrics and reducing oxide thickness, as well as applying a low drain-to-source voltage, which also contributes to improved energy efficiency. The proposed nanodevice meets the prerequisites for cutting-edge gas nanosensors, offering high sensing performance, improved scaling capability, low power consumption, and complementary metal–oxide–semiconductor compatibility, making it a compelling candidate for the next generation of ultrascaled FET-based gas nanosensors.
