A Self-Controlled Frequency Trimming Technique for Micromechanical Resonators

Abstract

This work demonstrates the proof of concept for a selfcontrolled electronic frequency trimming technique for micromechanical single crystalline silicon resonators. Trimming is carried out via localized self-induced thermal oxidation occurring during extreme thermal actuation of the resonant structures. The cooling effect at resonance, discussed for the first time in this work, allows the localized oxidation to stop automatically as soon as the resonator frequency reaches the targeted actuation frequency applied to the structure. The viability of this concept is demonstrated by application of both off-resonance and atresonance actuation signals to fabricated resonators showing that as opposed to the off-resonance signals, the at-resonance signals with the same intensity do not lead to frequency trimming.