A study on inorganic phase-change resist Ge₂Sb_2(1−x)Bi_2xTe₅and its mechanism

Abstract

The inorganic phase-change photoresist Ge2Sb1.5Bi0.5Te5 has a lot of advantages such as the two-sides of the photoresist, a large difference in the etching rate between it and Si, and so on, making it a promising candidate for use in the full-vacuum manufacture of the next generation ultra-large scale integrated circuits (ULSI). However, the physical origin of its excellent properties is still unclear, hindering its improvement and the optimization of its performance. In this work, we extended the Ge2Sb1.5Bi0.5Te5 to Ge2Sb2(1-x)Bi2xTe5 (GSBT, x = 0.1, 0.25, 0.35) and further investigated their properties. Using X-ray diffraction and X-ray absorption fine structure (XAFS) analyses, we built the structures of crystalline and amorphous GSBT, and attributed the excellent physical and chemical properties of crystalline GBST to the different atomic structures compared to amorphous GBST. Moreover, we clarified that the performance of GSBT was enhanced by the increase of Bi, accompanied by a decrease of the phase-change temperature, and gave a criterion for improving GSBT.

Asymmetric polarization and hysteresis behaviour in ferroelectric P(VDF–TrFE) (76 : 24) copolymer thin films spatially resolved via LIMM

“…The exceptional piezo-, pyro-and ferroelectric properties of PVDF (polyvinylidene fluoride) and its most common copolymer P(VDF-TrFE) (poly[vinylidene fluoride-co-trifluoroethylene]) have stimulated numerous studies for many years that aimed at understanding its structural, morphological and electrical properties. [1][2][3][4][5][6] After application of a high electrical field, PVDF exhibits pyro 7,8 -and piezoelectric 9 properties. PVDF is a semicrystalline polymer consisting of linear chains with the sequence (CH 2 -CF 2 ), as illustrated in Fig.…”

In situ synthesis of CdS/CdWO4 nanorods core–shell composite via acid dissolution

“…Hydrogen production from pure water in the presence of visible light proceeded without degradation of the composite over time by using it in conjunction with the oxidation side photocatalyst. Prior to this study, most reported CdWO 4 synthesis methods involved hydrothermal synthesis [22][23][24] or solvothermal synthesis. 25 These methods entailed crystal formation to obtain CdWO 4 nanorods, nanobers, 22-24 and nanoparticles.…”

Enhanced piezo‐electric property induced in graphene oxide/polyvinylidene fluoride composite flexible thin films

“…XRD pasttern of PVDF indicated peaks at 2h 5 18.68 and 2h 5 21.58 arising out of reflections from (020) and (110) planes arising from aand the b-phase of PVDF, respectively [39,40]. There are two other peaks at 2h 5 26.68 arising out of reflections from (021) plane of the PVDF a phase and 2h 5 39.58 arising out due to the PVDF a phase [39,41,42]. The broad peak located at 228 composed of two peaks b phase PVDF (21.68) and a shoulder peak of PVDF with less intensity (JCPDS card no.…”