A Study on Transparent Electrode Properties of Indium Tin Oxide Thin Films Deposited From Recycled Target

Abstract

In this study, we investigated the transparent electrode and mechanical properties of indium tin oxide (ITO) thin films deposited from recycled targets of In2O3 (90 wt %) and SnO3 (10 wt %). We also evaluated the effect of their heat treatment at different temperatures. The ITO thin film deposited on the glass substrate at ambient temperature exhibited microcrystallization characteristics in which the amorphous state was incorporated. When the annealing temperature was over 200 °C, the ITO thin film showed stable transparent electrode characteristics with a sheet resistance value of 7.2 Ω/sq and high transmittance of more than 85% in the visible light region through recovery and recrystallization. Under compressive stress, the ITO thin film exhibited stable elastic modulus and hardness values of more than 110 GPa and 6.0 GPa, respectively. It is anticipated that these outcomes will meet the electrical, optical, and mechanical property requirements for commercial ITO transparent electrodes.

Implantable acousto-optic window for monitoring ultrasound-mediated neuromodulation in vivo

“…The ITO-coated coverslip was heated up to 300°C on a hot plate for 1 h to increase the transparency and conductivity. 17 Because the cable was soldered on the other side of the transducer, the coverslip was flipped, and two gold island electrodes for the cable connection were formed by sputtering a gold electrode extended to the edge of the coverslip to make connections to the ITO electrode. The polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE) solution was prepared by dissolving 10 g of PVDF-TrFE powder (FC-20, Piezotech) in 15 g dimethylacetamide (271012, Sigma-Aldrich) and 36 g methyl ethyl ketone (63140-1230, Junsei).…”

Tuning and Modulation of the Photoinduced Current by Rectification of Surface Plasmons in Metal–Molecule–Nanoparticle–ITO Composite Junctions

“…The decrease of the light transmittance may result in increased light scattering between neighboring NPs thereby effectively diffusing the illumination of the individual particles. , Besides, it cannot be excluded that the light reflection or the light scattering from the ultrathin upper gold layer would also contribute to the response signal collected by the electrical circuits, especially when its thickness is in the same order as the NP size . Recently, the well-known indium tin oxide (ITO) came into focus as an electrode material in optoelectronic devices because of its combination of sufficient electrical conductivity, optical transparency, and favorable adhesion to polymer film surfaces and the possibility of film deposition for the desired microscopic structure. − A compromise must be made between electrical conductivity and optical transparency since increasing the film thickness and the concentration of charge carriers correspondingly increases the film’s conductivity but decreases its transparency . Here, we design a device that operates on the same principle as reported in ref , but that is improved regarding the electrode material and the cross section to achieve sufficient signal size without extreme focusing and to make the devices suitable for medium frequency operation in the hundreds of kHz to MHz regime.…”