A Technique for Converting Perhydropolysilazane to SiO[sub x] at Low Temperature

Lee, Jae-Seo; Oh, Jung-Hun; Moon, Sung-Woon; Sul, Woo-Suk; Kim, Sam-Dong

doi:10.1149/1.3264092

Cited by 21 publications

(13 citation statements)

References 10 publications

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“…PHPS is highly reactive with H 2 O and O 2 due to its molecular structure. Full conversion of PHPS to SiO 2 usually needs a high temperature (>450 °C), a special atmosphere (H 2 O 2 , hot water or ammonia), catalysis or irradiation by vacuum ultraviolet ray . Even use of catalysis, a humidity atmosphere and relative high temperature (>150 °C) are also necessary.…”

Section: Introductionmentioning

confidence: 99%

Hydrophobic, transparent and hard silicon oxynitride coating from perhydropolysilazane

Zhang

Shao

Luo

et al. 2015

Polymer International

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Silicon oxynitride coatings on glass and polyethylene terephthalate (PET) film have been fabricated by thermal annealing of inorganic polymer perhydropolysilazane (PHPS) between 60 °C and 200 °C. The chemical structure, thermal behavior and structural evolution of PHPS were investigated. The coatings obtained on glass possess pencil hardness as high as 9H, high transparency above 90% in the visible wavelength range, good adhesion to the substrate and a hydrophobic property with water contact angle above 98°. The PHPS coated PET film has pencil hardness above 4H, water contact angle 102° and a high scratch resistance property with no obvious scratches after a 50 cycles scratch test under a load of 2 kg. All these data imply the great potential of PHPS as a hard coating for optical devices. © 2015 Society of Chemical Industry

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Section: Introductionmentioning

confidence: 99%

Hydrophobic, transparent and hard silicon oxynitride coating from perhydropolysilazane

Zhang

Shao

Luo

et al. 2015

Polymer International

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“…Since then, various techniques that convert PHPS thin films into silica thin films have been proposed. The techniques include the standing in the ambient atmosphere, the heat treatment in water vapor, the exposure to vaporized ammonia atmosphere, the reaction with water by the catalytic action of amine in the baking step, the exposure to hydrogen peroxide vapor, the hydrothermal treatment (for preparing phenylsilsesquioxane films), the ultraviolet (UV) light irradiation, the UV light irradiation under soaking in hydrogen peroxide, the O 2 plasma treatment after baking, and the O 2 plasma treatment followed by high‐pressure H 2 O vapor heating . Most of these techniques realize PHPS‐to‐silica conversion at or near room temperature, which may proceed via hydrolysis reaction .…”

Section: Introductionmentioning

confidence: 99%

“…exposed PHPS films to vacuum UV (VUV) light, and Jung et al . as well as Lee et al . to UV light in 80°C H 2 O 2 solution, where the O/Si mole ratios were found to be 1.85 and 1.5–1.7, respectively, in their silica thin film products.…”

Section: Introductionmentioning

confidence: 99%

“…A fundamental question is left on whether or not the PHPSderived silica thin films are identical to dense glassy silica. Prager et al 24 exposed PHPS films to vacuum UV (VUV) light, and Jung et al 26 as well as Lee et al 27 to UV light in 80°C H 2 O 2 solution, where the O/Si mole ratios were found to be 1.85 and 1.5-1.7, respectively, in their silica thin film products. Such low O/Si mole ratios reveal the incomplete PHPS-to-silica conversion.…”

Section: Introductionmentioning

confidence: 99%

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Conversion of Solution‐Derived Perhydropolysilazane Thin Films into Silica in Basic Humid Atmosphere at Room Temperature

et al. 2013

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Spin‐on perhydropolysilazane (PHPS) thin films were converted into mechanically hard silica thin films by an exposure to the vapor from aqueous ammonia. Infrared absorption and X‐ray photoelectron spectroscopic analyses were conducted to clarify the details of the PHPS‐to‐silica conversion and the nature of the silica thin film products. The PHPS‐to‐silica conversion was found to proceed rapidly between 2 and 3 h of exposure via a reaction‐limited process, where the refractive index and the pencil hardness greatly decreased and increased, respectively. Finally, the O/Si mole ratio close to 2 was achieved, which has never been realized in literature for PHPS‐derived silica thin films. It was also found that the condensation of Si–OH groups proceeds in films immediately after PHPS hydrolysis, which is similar to the base‐catalyzed hydrolysis–condensation reaction of silicon alkoxides. Although the silica thin films obtained had refractive indices similar to that of silica glass, high pencil hardness over 9H on Si(100) substrates, and O/Si mole ratios close to 2, it was concluded that they are nonidentical to silica glass, containing trace amounts of Si–OH and Si–H groups.

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“…The O-to-Si ratio was also measured to be ∼2.0, being comparable with that reported in previous works. 45,46 To further inspect the coating qualities, garnet samples with thick silica layers were prepared using higher concentration PHPS solutions. From the cross-sectional SEM image (Figure S4), we confirm that silica layers were coated on the surface of garnets with excellent adhesion and uniformity.…”

Section: Silica Nanofilm On Llztomentioning

confidence: 99%

Facile Surface Modification Method To Achieve an Ultralow Interfacial Resistance in Garnet-Based Li Metal Batteries

Liu

Yang

Zhang

et al. 2019

ACS Appl. Energy Mater.

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Among various solid-state electrolytes (SSEs), the garnet type is currently the most promising one to realize Li metal-based batteries with a high energy density and improved safety. However, the huge interfacial resistance, resulting from the poor interface between the Li metal and the pellet, impedes its practical applications in Li metal-based batteries. In this work, we report a facile yet effective methodology to address the issue. The garnet pellet is modified by a thin perhydropolysilazane (PHPS) layer simply via spin coating, which then spontaneously converts into silica by reacting with water vapor and oxygen in air. After lithiation, this layer not only functions as a fast Li + conductor but also dramatically improves the contact between lithium metal and garnet. As a result, the interfacial resistance is substantially reduced from 1046 to 49 Ω cm 2 , and a symmetric lithium cell can achieve an ultralow overpotential and stable plating/stripping cyclability without lithium dendrite growth. Furthermore, a full Li/LiFePO 4 battery with the silica modified garnet demonstrates a remarkably higher discharge capacity (>150 mAh g −1 at 0.1 C), Coulombic efficiency (>99%), and cycling stability (>50 cycles) compared with its pristine counterpart.

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A Technique for Converting Perhydropolysilazane to SiO[sub x] at Low Temperature

Cited by 21 publications

References 10 publications

Hydrophobic, transparent and hard silicon oxynitride coating from perhydropolysilazane

Hydrophobic, transparent and hard silicon oxynitride coating from perhydropolysilazane

Conversion of Solution‐Derived Perhydropolysilazane Thin Films into Silica in Basic Humid Atmosphere at Room Temperature

Facile Surface Modification Method To Achieve an Ultralow Interfacial Resistance in Garnet-Based Li Metal Batteries

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