1987
DOI: 10.1149/1.2100450
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A TEM Study of the Effect of Accelerators on Pd‐Sn Colloidal Catalysts and on the Initiation of Electroless Cu Deposition on Epoxy

Abstract: A technique was developed for the preparation of transparent, thin film epoxy samples for direct TEM investigation of the activation of epox:r and the initiation of the electroless Cu reaction. Associated EDX measurements determined the composition of the nucleated Cu particles. The steps of activation with a Pd-Sn colloidal catalyst, acceleration with NaOH, HC1, or EDTA, and initiation of electroless Cu plating were studied individually. All of the accelerators were effective in removing tin from the surface … Show more

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Cited by 43 publications
(38 citation statements)
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“…Direct transmission electron microscopy (TEM) through transparent epoxy samples was described in [21]. The substrate was a Si wafer having a number of Si3N4-covered windows.…”
Section: Experimental Methodsmentioning
confidence: 99%
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“…Direct transmission electron microscopy (TEM) through transparent epoxy samples was described in [21]. The substrate was a Si wafer having a number of Si3N4-covered windows.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…Additionally, Matijevic et al [14] point out that the absence of light scattering from a solution does not prove the absence of a colloid. Osaka et al [20] and Horkans et al [21] have used electron microscopy to investigate the effect of different accelerators on the PdSn catalyst layer. Horkans et al [21] prepared thin epoxy samples for direct transmission electron microscopy on substrates chemically simEar to epoxy boards.…”
Section: Introductionmentioning
confidence: 99%
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“…In the latter case [31][32][33], the oxidized substrate surface is directly activated by immersion in a colloidal solution obtained from an acidic mixture of tin chloride and palladium chloride. A further treatment (acceleration step) is still needed to allow the catalyst to be efficient.…”
Section: Electroless Depositionmentioning
confidence: 99%
“…[1][2][3][4][5] The conventional techniques of catalyzation are the two-step process consisting of sensitization with SnCl 2 /HCl followed by acceleration with PdCl 2 /HCl solution, and the one-step process which involves dipping the substrate in a colloid containing Pd/Sn salts. The entire substrate is catalyzed and photolithography or photomasks are used to activate a selected portion of the substrate.…”
mentioning
confidence: 99%