A Trade-Off for Frequency -Voltage Dependence of RF MEMS Switch

Abstract

This article introduced Trade-Off is taken as a new measure for MEMS switching to select the most probable frequencyvoltage dependence for cantilevered beam RF MEMS switches. The switching voltage of the mentioned structures for MEMS switches is determined and analyzed at different geometrical parameters. The results investigate the geometrical parameters of the eight MEMS structures that control the switching voltage to achieve a maximum frequency response for the switch at lower driving voltage.