A trapezoidal bending piezoelectric multilayer actuator by screen printing technology

Zhu, Weiguang; Wang, Zhihong; Zhang, Zhe

doi:10.1080/00150190108225194

Cited by 2 publications

(2 citation statements)

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“…Piezoelectric ceramic can be prepared from either a green paste of oxide particles [ 26 , 27 ] or a sol-gel liquid [ 20 , 28 , 29 ]. Green paste is screen printed on a substrate or molded into a bulk piece alone.…”

Section: Printable Materialsmentioning

confidence: 99%

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Ink-Jet Printing of Micro-Electro-Mechanical Systems (MEMS)

Lau

Shrestha

2017

Micromachines

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Beyond printing text on paper, inkjet printing methods have recently been applied to print passive electrical and optical microparts, such as conductors, resistors, solder bumps and polymeric micro lenses. They are also useful to print micro-electro-mechanical systems (MEMS) as sub-millimeter sensor and actuator arrays, such as multifunctional skins applicable to robotic application and ambient monitoring. This paper presents the latest review of a few successful cases of printable MEMS devices. This review shows that inkjet printing is good for printing two-dimensional or surface MEMS devices from a small unit to an array over a large area. In the future, three-dimensional printing of multi-materials, from metal, plastic, to ceramic, will open the possibility of realizing more variety and function of a large-areal MEMS array, for a mobile electro-mechanical systems.

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Section: Printable Materialsmentioning

confidence: 99%

“…Sol-gel is solvent cast and evaporated onto a substrate. They are subsequently sintered and poled before turning into the active piezoelectric layer [ 26 , 28 , 30 ]. Dicing is commonly used to cut or engrave piezoelectric ceramic in patterns, but risks breaking the brittle ceramic.…”

Section: Printable Materialsmentioning

confidence: 99%