A wafer-level 3D integrated T/R microsystem with 0.5-wavelength self-matching connectors

Zhang, Shengchang; Shan, Guangbao; Luo, Yi; Deng, Hui

doi:10.1016/j.mejo.2024.106421

Microelectronics Journal

2024

DOI: 10.1016/j.mejo.2024.106421

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A wafer-level 3D integrated T/R microsystem with 0.5-wavelength self-matching connectors

Shengchang Zhang,

Guangbao Shan,

Yi Luo

et al.

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A wafer-level 3D integrated T/R microsystem with 0.5-wavelength self-matching connectors

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References 20 publications

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