“…With increasing demands for high data rate services and the miniaturization of portable radio devices, the challenge of supporting multiple air interface technologies that enable compact multi-mode multi-band devices has become critical [1,2]. Currently, the market for electrically controllable matching circuits, tunable voltage-controlled oscillators (VCOs), tunable filters, and multi-band power amplifier modules (PAM) is growing rapidly [3][4][5]. Digitally tunable capacitors using complementary metal-oxide-semiconductors (CMOS) or microelectromechanical system (MEMS) switches have been widely used to meet these technical trends [6][7][8].…”