2014
DOI: 10.3390/s140203065
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A Wireless and Passive Low-Pressure Sensor

Abstract: This paper will discuss the results obtained with a first prototype of a completely passive and wireless low pressure sensor. The device is a heat conductivity gauge, based on a wireless and passive SAW temperature sensor. The required heating energy is applied to the sensor using inductive coupling. The prototype was successfully tested in a vacuum chamber. Its equilibrium temperature changed drastically and in a reproducible way when pressure steps were applied. However, the response time was very long. A mo… Show more

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Cited by 16 publications
(18 citation statements)
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“…Because of the working principle, the sensitivity (and therefore, the accuracy) is much higher at low pressure, in the so-called Knudsen regime (∼ [0.1 -100 mTorr]). The sensitivity of a similar sensor was characterized in [10]. It was found to be close to 0.17 • C/Pa at low pressure.…”
Section: Fig 2 Equivalent Circuit Of the Sensor Architecturementioning
confidence: 94%
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“…Because of the working principle, the sensitivity (and therefore, the accuracy) is much higher at low pressure, in the so-called Knudsen regime (∼ [0.1 -100 mTorr]). The sensitivity of a similar sensor was characterized in [10]. It was found to be close to 0.17 • C/Pa at low pressure.…”
Section: Fig 2 Equivalent Circuit Of the Sensor Architecturementioning
confidence: 94%
“…The computation of the equivalent resistance of air (R Air ) is also described in [10]. However, higher pressure steps were applied in the present study, which resulted in lower R Air values.…”
Section: Equivalent System Modelmentioning
confidence: 99%
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